Big sized clean room
JIS B 9920 cleanliness class maximum concentration (Pcs/m³) / Class 5 : 100,000m³ / Capacity : m² (16,000x16,000mm) 760m² (16,000x16,000x3,000mm) / Temperature and humidity condition : Temperature : 23℃±3℃, Humidity 65% less / Ambient conditions : Temperature 35℃ during summer, Humidity 70% less / Ambient conditions : Temperature 35℃ during summer, Humidity 70% less / Temperature -5℃ during winter, Humidity 40% less